Facilities for device prototyping
- Class-1000 clean room for nano/microfabrication
- Class-1000 clean room for device operation
- Laser lithography system (Hidelberg, Germany）
- Double-sided mask aligner
- Nanoimprint lithography (NIL) system
- Spin coater
- Ultrapure water system
- Optical microscope
- Magnetron sputtering
- ICP etchers
- Scanning microplasma etcher
- Plasma asher
- VUV exposure system
- Ultrasonic vibration cutting system
- Laminator
- Electroplating system for Si wafers
- Anodic bonding system
- Chemical resistant draft chamber
- Vacuum oven
- 3D milling machine
Facilities for biological research
- Biological safety cabinet
- Millipore water purification system
- Biomedical freezer
- Deep freezer
- Autoclave
- CO2 incubators
- Centrifuge
- Liquid chromatograph system
- Thermal cycler
- Nanodrop
- Gel electrophoresis system (Direct Blot)
- Biological microscope
- High-speed CCD camera
- EB-CCD camera
- Image intensifier
Facilities for measurement/analysis
- Helium leak detector
- Multi-channel spectrometer
- Monochromator
- Gauss meter
- Data logger
- Digital oscilloscope
- Function generator
- Resistivity meter
- Illuminometer
- Nanoparticle counter
- Lasers
- Atomic force microscope